Julian Schulze
Julian Schulze
Scientist/Lecturer (Ruhr-University Bochum)
Verified email at aept.rub.de - Homepage
TitleCited byYear
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
Z Donkó, J Schulze, BG Heil, U Czarnetzki
Journal of Physics D: Applied Physics 42 (2), 025205, 2008
1442008
Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
T Gans, J Schulze, D O’connell, U Czarnetzki, R Faulkner, AR Ellingboe, ...
Applied physics letters 89 (26), 261502, 2006
1432006
The electrical asymmetry effect in capacitively coupled radio frequency discharges–measurements of dc self bias, ion energy and ion flux
J Schulze, E Schüngel, U Czarnetzki
Journal of Physics D: Applied Physics 42 (9), 092005, 2009
1262009
The electrical asymmetry effect in capacitively coupled radio-frequency discharges
D Czarnetzki, Schulze, Schuengel
Plasma Sources Science and Technology 20 (2), 024010, 2011
116*2011
Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas
J Schulze, A Derzsi, K Dittmann, T Hemke, J Meichsner, Z Donkó
Physical review letters 107 (27), 275001, 2011
1102011
Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge
J Schulze, T Gans, D O'Connell, U Czarnetzki, AR Ellingboe, MM Turner
Journal of Physics D: Applied Physics 40 (22), 7008, 2007
1012007
Stochastic heating in asymmetric capacitively coupled RF discharges
J Schulze, BG Heil, D Luggenhölscher, RP Brinkmann, U Czarnetzki
Journal of Physics D: Applied Physics 41 (19), 195212, 2008
952008
Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures
J Schulze, Z Donkó, BG Heil, D Luggenhölscher, T Mussenbrock, ...
Journal of Physics D: Applied Physics 41 (10), 105214, 2008
842008
Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures
J Schulze, BG Heil, D Luggenhölscher, T Mussenbrock, RP Brinkmann, ...
Journal of Physics D: Applied Physics 41 (4), 042003, 2008
842008
Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges
J Schulze, E Schüngel, Z Donkó, D Luggenhölscher, U Czarnetzki
Journal of Physics D: Applied Physics 43 (12), 124016, 2010
762010
Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges
Z Donkó, J Schulze, U Czarnetzki, D Luggenhölscher
Applied Physics Letters 94 (13), 131501, 2009
682009
Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments
Z Donkó, J Schulze, U Czarnetzki, A Derzsi, P Hartmann, I Korolov, ...
Plasma Physics and Controlled Fusion 54 (12), 124003, 2012
642012
Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model
J Schulze, E Schüngel, U Czarnetzki, Z Donkó
Journal of Applied Physics 106 (6), 063307, 2009
642009
Numerical modeling of electron beams accelerated by the radio frequency boundary sheath
BG Heil, J Schulze, T Mussenbrock, RP Brinkmann, U Czarnetzki
IEEE Transactions on Plasma Science 36 (4), 1404-1405, 2008
622008
The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
Z Donkó, J Schulze, P Hartmann, I Korolov, U Czarnetzki, E Schüngel
Applied Physics Letters 97 (8), 081501, 2010
612010
The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges
J Schulze, E Schüngel, Z Donkó, U Czarnetzki
Plasma Sources Science and Technology 20 (1), 015017, 2011
542011
Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect
E Schüngel, QZ Zhang, S Iwashita, J Schulze, LJ Hou, YN Wang, ...
Journal of Physics D: Applied Physics 44 (28), 285205, 2011
482011
The Electrical Asymmetry Effect-A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges
U Czarnetzki, BG Heil, J Schulze, Z Donkó, T Mussenbrock, ...
Journal of Physics: Conference Series 162 (1), 012010, 2009
472009
Coupling effects in inductive discharges with radio frequency substrate biasing
J Schulze, E Schüngel, U Czarnetzki
Applied Physics Letters 100 (2), 024102, 2012
442012
The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges
E Schüngel, S Mohr, S Iwashita, J Schulze, U Czarnetzki
Journal of Physics D: Applied Physics 46 (17), 175205, 2013
422013
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