Tero S. Kulmala
Tero S. Kulmala
Heidelberg Instruments Nano/SwissLitho AG, Switzerland
Verified email at himt.ch
Title
Cited by
Cited by
Year
Quantifying defects in graphene via Raman spectroscopy at different excitation energies
LG Canšado, A Jorio, EHM Ferreira, F Stavale, CA Achete, RB Capaz, ...
Nano letters 11 (8), 3190-3196, 2011
23232011
Quantifying defects in graphene via Raman spectroscopy at different excitation energies
LG Canšado, A Jorio, EHM Ferreira, F Stavale, CA Achete, RB Capaz, ...
Nano letters 11 (8), 3190-3196, 2011
23232011
Inkjet-printed graphene electronics
F Torrisi, T Hasan, W Wu, Z Sun, A Lombardo, TS Kulmala, GW Hsieh, ...
Acs Nano 6 (4), 2992-3006, 2012
9612012
2 μm solid-state laser mode-locked by single-layer graphene
AA Lagatsky, Z Sun, TS Kulmala, RS Sundaram, S Milana, F Torrisi, ...
Applied Physics Letters 102 (1), 013113, 2013
1242013
Ultrafast and widely tuneable vertical-external-cavity surface-emitting laser, mode-locked by a graphene-integrated distributed Bragg reflector
CA Zaugg, Z Sun, VJ Wittwer, D Popa, S Milana, TS Kulmala, ...
Optics express 21 (25), 31548-31559, 2013
1162013
Carbon nanotube thin film transistors based on aerosol methods
MY Zavodchikova, T Kulmala, AG Nasibulin, V Ermolov, S Franssila, ...
Nanotechnology 20 (8), 085201, 2009
592009
SnO x high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithography
E Buitrago, R Fallica, D Fan, TS Kulmala, M Vockenhuber, Y Ekinci
Microelectronic Engineering 155, 44-49, 2016
342016
Transport conductivity of graphene at RF and microwave frequencies
SA Awan, A Lombardo, A Colli, G Privitera, TS Kulmala, JM Kivioja, ...
2D Materials 3 (1), 015010, 2016
312016
Platinum and palladium oxalates: positive-tone extreme ultraviolet resists
M Sortland, J Hotalen, R Del Re, J Passarelli, M Murphy, TS Kulmala, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (4), 043511, 2015
282015
Novel carbon nanotube network deposition technique for electronic device fabrication
MY Zavodchikova, AG Nasibulin, T Kulmala, K Grigoras, AS Anisimov, ...
physica status solidi (b) 245 (10), 2272-2275, 2008
162008
Graphene-based MIM diode and associated methods
A Colli, SA Awan, A Lombardo, TJ Echtermeyer, TS Kulmala, AC Ferrari
US Patent 9,202,945, 2015
132015
Graphene-based MIM diode and associated methods
A Colli, SA Awan, A Lombardo, TJ Echtermeyer, TS Kulmala, AC Ferrari
US Patent 9,202,945, 2015
132015
Self-aligned coupled nanowire transistor
TS Kulmala, A Colli, A Fasoli, A Lombardo, S Haque, AC Ferrari
ACS nano 5 (9), 6910-6915, 2011
122011
EUV lithography process challenges
E Buitrago, TS Kulmala, R Fallica, Y Ekinci
Frontiers of Nanoscience 11, 135-176, 2016
112016
Toward 10 nm half-pitch in extreme ultraviolet lithography: results on resist screening and pattern collapse mitigation techniques
TS Kulmala, M Vockenhuber, E Buitrago, R Fallica, Y Ekinci
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 033507, 2015
92015
Toward 10nm half-pitch in EUV lithography: results on resist screening and pattern collapse mitigation techniques
TS Kulmala, M Vockenhuber, E Buitrago, R Fallica, Y Ekinci
Extreme Ultraviolet (EUV) Lithography VI 9422, 942204, 2015
92015
Wavelength tunable graphene modelocked VECSEL
CA Zaugg, Z Sun, D Popa, S Milana, T Kulmala, RS Sundaram, ...
CLEO: Science and Innovations, CW1G. 4, 2013
62013
High throughput lithography using thermal scanning probes
C Rawlings, M Spieser, C Schwemmer, TS Kulmala, YKR Cho, S Bonanni, ...
2017 19th International Conference on Solid-State Sensors, Actuators andá…, 2017
52017
Pattern collapse mitigation in inorganic resists via a polymer freeze technique
TS Kulmala, E Buitrago, M Vockenhuber, Y Ekinci
Microelectronic Engineering 155, 39-43, 2016
52016
Single-nanometer accurate 3D nanoimprint lithography with master templates fabricated by NanoFrazor lithography
TS Kulmala, CD Rawlings, M Spieser, T Glinsner, A Schleunitz, ...
Novel Patterning Technologies 2018 10584, 1058412, 2018
32018
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