Ion Implantation of Graphene Toward IC Compatible Technologies U Bangert, W Pierce, DM Kepaptsoglou, Q Ramasse, R Zan, MH Gass, ... Nano letters 13 (10), 4902-4907, 2013 | 207 | 2013 |
Charge storage and interface states effects in Si-nanocrystal memory obtained using low-energy implantation and annealing E Kapetanakis, P Normand, D Tsoukalas, K Beltsios, J Stoemenos, ... Applied Physics Letters 77 (21), 3450-3452, 2000 | 190 | 2000 |
Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering AH Al-Bayati, KG Orrman-Rossiter, JA Van Den Berg, DG Armour Surface science 241 (1-2), 91-102, 1991 | 102 | 1991 |
An investigation of the kinetics of structural changes during the early oxidation stages of a Ni (100) surface using low energy ion scattering (LEIS) JA Van den Berg, LK Verheij, DG Armour Surface Science 91 (1), 218-236, 1980 | 74 | 1980 |
Doping of few-layered graphene and carbon nanotubes using ion implantation U Bangert, A Bleloch, MH Gass, A Seepujak, J Van den Berg Physical Review B 81 (24), 245423, 2010 | 71 | 2010 |
Depth profile characterization of ultra shallow junction implants P Hönicke, B Beckhoff, M Kolbe, D Giubertoni, J van den Berg, G Pepponi Analytical and bioanalytical chemistry 396, 2825-2832, 2010 | 70 | 2010 |
Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures JA Van den Berg, DG Armour, S Zhang, S Whelan, H Ohno, TS Wang, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 69 | 2002 |
Nanocrystals manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications P Normand, E Kapetanakis, P Dimitrakis, D Skarlatos, K Beltsios, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004 | 68 | 2004 |
MIAMI: Microscope and ion accelerator for materials investigations JA Hinks, JA Van Den Berg, SE Donnelly Journal of Vacuum Science & Technology A 29 (2), 2011 | 66 | 2011 |
Structure analysis of an oxidized nickel (110) surface using low energy ion scattering LK Verheij, JA Van den Berg, DG Armour Surface Science 84 (2), 408-426, 1979 | 60 | 1979 |
Formation of 2‐D Arrays of Silicon Nanocrystals in Thin SiO2 Films by Very‐Low Energy Si+ Ion Implantation P Normand, D Tsoukalas, E Kapetanakis, JA Van Den Berg, DG Armour, ... Electrochemical and solid-state letters 1 (2), 88, 1998 | 57 | 1998 |
Atomic layer deposition of ruthenium thin films from (ethylbenzyl)(1-ethyl-1, 4-cyclohexadienyl) Ru: Process characteristics, surface chemistry, and film properties M Popovici, B Groven, K Marcoen¶, QM Phung, S Dutta, J Swerts, ... Chemistry of Materials 29 (11), 4654-4666, 2017 | 52 | 2017 |
A comparison of atom and ion induced SSIMS—Evidence for a charge induced damage effect in insulator materials A Brown, JA van den Berg, JC Vickerman Spectrochimica Acta Part B: Atomic Spectroscopy 40 (5-6), 871-877, 1985 | 51 | 1985 |
Theoretical and experimental studies of the broadening of dilute delta‐doped Si spikes in GaAs during SIMS depth profiling R Badheka, M Wadsworth, DG Armour, JA Van den Berg, JB Clegg Surface and interface analysis 15 (9), 550-558, 1990 | 49 | 1990 |
Si ultrashallow p+n junctions using low‐energy boron implantation A Bousetta, JA Van den Berg, DG Armour, PC Zalm Applied physics letters 58 (15), 1626-1628, 1991 | 47 | 1991 |
Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films P Normand, K Beltsios, E Kapetanakis, D Tsoukalas, T Travlos, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2001 | 42 | 2001 |
On the production and annealing of bombardment induced surface damage on a nickel (110) surface LK Verheij, JA Van den Berg, DG Armour Surface Science 122 (2), 216-234, 1982 | 42 | 1982 |
Ion beam deposited epitaxial thin silicon films KG Orrman-Rossiter, AH Al-Bayati, DG Armour, SE Donnelly, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1991 | 41 | 1991 |
Low energy ion scattering (LEIS) and the compositional and structural analysis of solid surfaces. Part I JA Van den Berg, DG Armour Vacuum 31 (6), 259-270, 1981 | 40 | 1981 |
Evidence of a charge induced contribution to the sputtering yield of insulating and semiconducting materials AJ Eccles, JA Van den Berg, A Brown, JC Vickerman Applied physics letters 49 (4), 188-190, 1986 | 38 | 1986 |