Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas A Annušová, D Marinov, JP Booth, N Sirse, ML Da Silva, B Lopez, ... Plasma Sources Science and Technology 27 (4), 045006, 2018 | 64 | 2018 |
Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma S Sharma, N Sirse, PK Kaw, MM Turner, AR Ellingboe Physics of Plasmas 23 (11), 2016 | 57 | 2016 |
Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge S Sharma, N Sirse, MM Turner, AR Ellingboe Physics of Plasmas 25 (6), 2018 | 50 | 2018 |
Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements GA Curley, L Gatilova, S Guilet, S Bouchoule, GS Gogna, N Sirse, ... Journal of Vacuum Science & Technology A 28 (2), 360-372, 2010 | 49 | 2010 |
Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge S Sharma, A Sen, N Sirse, MM Turner, AR Ellingboe Physics of Plasmas 25 (8), 2018 | 41 | 2018 |
Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges S Sharma, N Sirse, A Sen, JS Wu, MM Turner Journal of Physics D: Applied Physics 52 (36), 365201, 2019 | 37 | 2019 |
Using the resonance hairpin probe and pulsed photodetachment technique as a diagnostic for negative ions in oxygen plasma J Conway, N Sirse, SK Karkari, MM Turner Plasma Sources Science and Technology 19 (6), 065002, 2010 | 36 | 2010 |
Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency S Sharma, N Sirse, A Kuley, MM Turner Plasma Sources Science and Technology 29 (4), 045003, 2020 | 34 | 2020 |
Absolute atomic chlorine densities in a Cl2 inductively coupled plasma determined by two-photon laser-induced fluorescence with a new calibration method JP Booth, Y Azamoum, N Sirse, P Chabert Journal of Physics D: Applied Physics 45 (19), 195201, 2012 | 33 | 2012 |
Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges S Sharma, N Sirse, A Sen, MM Turner, AR Ellingboe Physics of Plasmas 26 (10), 2019 | 26 | 2019 |
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform S Sharma, N Sirse, MM Turner Plasma Sources Science and Technology 29 (11), 114001, 2020 | 24 | 2020 |
Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push–pull plasma source KS Kim, N Sirse, KH Kim, AR Ellingboe, KN Kim, GY Yeom Journal of Physics D: Applied Physics 49 (39), 395201, 2016 | 24 | 2016 |
Numerical experiment to estimate the validity of negative ion diagnostic using photo-detachment combined with Langmuir probing N Oudini, N Sirse, R Benallal, F Taccogna, A Aanesland, A Bendib, ... Physics of Plasmas 22 (7), 2015 | 24 | 2015 |
Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals S Sharma, SK Mishra, PK Kaw, A Das, N Sirse, MM Turner Plasma Sources Science and Technology 24 (2), 025037, 2015 | 24 | 2015 |
The temporal evolution in plasma potential during laser photo-detachment used to diagnose electronegative plasma N Sirse, SK Karkari, MA Mujawar, J Conway, MM Turner Plasma Sources Science and Technology 20 (5), 055003, 2011 | 24 | 2011 |
Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge JW Bradley, R Dodd, SD You, N Sirse, SK Karkari Journal of Vacuum Science & Technology A 29 (3), 2011 | 24 | 2011 |
Probing negative ion density and temperature using a resonance hairpin probe N Sirse, SK Karkari, MM Turner Plasma Sources Science and Technology 24 (2), 022001, 2015 | 22 | 2015 |
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities S Sharma, N Sirse, A Kuley, A Sen, MM Turner Journal of Physics D: Applied Physics 54 (5), 055205, 2020 | 21 | 2020 |
Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge N Sirse, MH Jeon, GY Yeom, AR Ellingboe Plasma Sources Science and Technology 23 (6), 065046, 2014 | 21 | 2014 |
Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms S Sharma, N Sirse, A Kuley, MM Turner Journal of Physics D: Applied Physics 55 (27), 275202, 2022 | 19 | 2022 |