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Leonid Dorf
Leonid Dorf
E-mailová adresa ověřena na: amat.com
Název
Citace
Citace
Rok
Feol low-k spacers
KS Collins, K Ramaswamy, Y Zhang, H Chang, L Dorf, MF Wu, S Rauf
US Patent App. 14/323,855, 2016
1692016
Plume reduction in segmented electrode Hall thruster
Y Raitses, LA Dorf, AA Litvak, NJ Fisch
Journal of Applied Physics 88 (3), 1263-1270, 2000
1082000
System for tunable workpiece biasing in a plasma reactor
T Koh, PA Kraus, L Dorf, P Gopalraja
US Patent 10,373,804, 2019
902019
Experimental onset threshold and magnetic pressure pile-up for 3D reconnection
TP Intrator, X Sun, G Lapenta, L Dorf, I Furno
Nature Physics 5 (7), 521-526, 2009
772009
Current-driven rotating-kink mode in a plasma column with a non-line-tied free end
I Furno, TP Intrator, DD Ryutov, S Abbate, T Madziwa-Nussinov, A Light, ...
Physical review letters 97 (1), 015002, 2006
742006
Variable operation of Hall thruster with multiple segmented electrodes
NJ Fisch, Y Raitses, LA Dorf, AA Litvak
Journal of Applied Physics 89 (4), 2040-2046, 2001
732001
Experimental studies of anode sheath phenomena in a Hall thruster discharge
L Dorf, Y Raitses, NJ Fisch
Journal of Applied Physics 97 (10), 2005
582005
Anode sheath in Hall thrusters
L Dorf, V Semenov, Y Raitses
Applied physics letters 83 (13), 2551-2553, 2003
562003
Ion-ion plasma atomic layer etch process and reactor
KS Collins, K Ramaswamy, JD Carducci, S Rauf, L Dorf, Y Yang
US Patent 10,475,626, 2019
552019
Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber
Z Chen, S Rauf, WR Merry, L Dorf, K Ramaswamy, KS Collins
US Patent 8,313,664, 2012
552012
System for tunable workpiece biasing in a plasma reactor
T Koh, PA Kraus, L Dorf, P Gopalraja
US Patent 10,923,320, 2021
512021
Adjustable extended electrode for edge uniformity control
O Luere, L Dorf, R Dhindsa, S Srinivasan, DM Koosau, J Rogers
US Patent 10,504,702, 2019
502019
Electrostatic probe apparatus for measurements in the near-anode region of Hall thrusters
L Dorf, Y Raitses, NJ Fisch
Review of Scientific Instruments 75 (5), 1255-1260, 2004
472004
Effects of boundary conditions and flow on the kink instability in a cylindrical plasma column
I Furno, TP Intrator, G Lapenta, L Dorf, S Abbate, DD Ryutov
Physics of plasmas 14 (2), 2007
422007
Processing with powered edge ring
L Dorf, AK Mishra, O Luere, R Dhindsa, J Rogers, DM Koosau, ...
US Patent App. 16/253,655, 2019
412019
Systems and methods for controlling a voltage waveform at a substrate during plasma processing
L Dorf, JH Rogers, O Luere, T Koh, R Dhindsa, S Srinivasan
US Patent App. 15/618,082, 2017
412017
Experimental demonstration of plasma-drag acceleration of a dust cloud to hypervelocities
CM Ticoş, Z Wang, GA Wurden, JL Kline, DS Montgomery, LA Dorf, ...
Physical review letters 100 (15), 155002, 2008
412008
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
L Dorf, O Luere, R Dhindsa, J Rogers, S Srinivasan, AK Mishra
US Patent 10,555,412, 2020
402020
Effect of anode dielectric coating on Hall thruster operation
L Dorf, Y Raitses, NJ Fisch, V Semenov
Applied Physics Letters 84 (7), 1070-1072, 2004
382004
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
L Dorf, O Luere, R Dhindsa, J Rogers, S Srinivasan, AK Mishra
US Patent 10,448,494, 2019
372019
Systém momentálně nemůže danou operaci provést. Zkuste to znovu později.
Články 1–20